Issues in MEMS Macromodeling
نویسنده
چکیده
AHDL modeling of MEMS components for system simulation is slowly maturing, however many issues remain regarding interoperability and composability. A discussion of MEMS natures, hierarchy and model partitioning helps to introduce the issues. Specific conventions for interoperability include choice of component reference frame and associated reference directions. A composite discipline extension to AHDLs is proposed to enable a single-port representation of micromechanical connection points in 2-D and 3-D space.
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تاریخ انتشار 2003